Ghent University Academic Bibliography

Show Sort by

Your filters: cql: author exact F3313E58-F0ED-11E1-A9DE-61C894A0A6B4 cql: author exact 034F309C-F0EE-11E1-A9DE-61C894A0A6B4

Add to list
- Conference Paper
- C3
- open access
Plasma-enhanced ALD on particles and powders

Geert Rampelberg (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) and Christophe Detavernier (UGent)

(2016) Plasma Surface Engineering, 15th International conference, Abstracts.
Add to list
- Conference Paper
- C3
- open access
Thermal and plasma enhanced atomic layer deposition on powders and particles

Geert Rampelberg (UGent) , Véronique Cremers (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) and Christophe Detavernier (UGent)

(2016) Belgian Physical Society, General scientific meeting, Abstracts.
Add to list
Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor

Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Philippe Smet (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2014) ACS APPLIED MATERIALS & INTERFACES. 6(10). p.7316-7324
Add to list
- Conference Paper
- C3
- open access
Conformal nanocoatings for surface engineering of particles by thermal and plasma-enhanced atomic layer deposition using a rotary reactor

Geert Rampelberg (UGent) , Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2014) Advanced Ceramics and Composites, 38th International conference, Abstracts.
Add to list
- Conference Paper
- C1
- open access
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2013) Partec 2013, Proceedings.
Add to list
- Conference Paper
- C3
- open access
Thermal and plasma-enhanced ALD of TiN on powders using a rotary reactor

Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2013) Atomic Layer Deposition, 13th International conference, Abstract book.
Add to list
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Delphine Longrie (UGent) , Davy Deduytsche (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2012) SURFACE & COATINGS TECHNOLOGY. 213. p.183-191
Add to list
- Conference Paper
- C3
- open access
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Delphine Longrie (UGent) , Kilian Devloo-Casier (UGent) , Johan Haemers (UGent) , Kris Driesen and Christophe Detavernier (UGent)

(2012) Atomic Layer Deposition, 12th International conference, Abstract book.
Add to list
Texture of atomic layer deposited ruthenium

Jan Musschoot, Qi Xie (UGent) , Davy Deduytsche (UGent) , Koen De Keyser, Delphine Longrie (UGent) , Johan Haemers (UGent) , Sven Van den Berghe, Roland Van Meirhaeghe, Jan D'Haen and Christophe Detavernier (UGent)

(2010) MICROELECTRONIC ENGINEERING. 87(10). p.1879-1883

Academic Bibliography

Plasma-enhanced ALD on particles and powders

Thermal and plasma enhanced atomic layer deposition on powders and particles

Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor

Conformal nanocoatings for surface engineering of particles by thermal and plasma-enhanced atomic layer deposition using a rotary reactor

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Thermal and plasma-enhanced ALD of TiN on powders using a rotary reactor

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Texture of atomic layer deposited ruthenium

Contents

Support

Contact