Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact D419B61A-6CA1-11E6-8989-8B64B5D1D7B1 or (type any "bookEditor journalEditor issueEdi... cql: keyword exact "growth" Add to list Journal Article A1 open access A liquid alkoxide precursor for the atomic layer deposition of aluminum oxide films Li'ao Cao (UGent) , Felix Mattelaer (UGent) , Timo Sajavaara, Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2020) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 38(2). Add to list Journal Article A1 Atomic layer deposition of Al2O3 using aluminum triisopropoxide (ATIP) : a combined experimental and theoretical study Ba Tai Truong (UGent) , Li'ao Cao (UGent) , Felix Mattelaer (UGent) , Geert Rampelberg (UGent) , Fatemeh SM Hashemi, Jolien Dendooven (UGent) , J Ruud van Ommen, Christophe Detavernier (UGent) and Marie-Françoise Reyniers (UGent) (2019) JOURNAL OF PHYSICAL CHEMISTRY C. 123(1). p.485-494 Add to list Journal Article A1 Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films Fatemeh SM Hashemi, Li'ao Cao (UGent) , Felix Mattelaer (UGent) , Timo Sajavaara, J Ruud van Ommen and Christophe Detavernier (UGent) (2019) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 37(4).