Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 9CF2C89C-6658-11E6-A249-EAF7B4D1D7B1 cql: author exact F373541E-F0ED-11E1-A9DE-61C894A0A6B4 Add to list Journal Article A1 open access Modeling reactive magnetron sputtering : opportunities and challenges Diederik Depla (UGent) , Koen Strijckmans (UGent) , Dulmaa Altangerel (UGent) , Florian Cougnon, Robin Dedoncker, Roeland Schelfhout (UGent) , Isabella Schramm (UGent) , Filip Moens and Roger De Gryse (UGent) (2019) THIN SOLID FILMS. 688.