Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 85E5B59E-35F8-11E8-A1F6-1F7112A95AF2 or (type any "bookEditor journalEditor issueEdi... cql: keyword exact "al2o3" Add to list Conference Paper C3 open access Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification Juan Santo-Domingo Peñaranda (UGent) , Mikko Nisula (UGent) , Sofie Vandenbroucke (UGent) , Matthias Minjauw (UGent) , Jin Li (UGent) , Andreas Werbrouck (UGent) , Jonas Keukelier (UGent) , Andrea Itziar Pitillas Martinez (UGent) , Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2021) AVS 21st International Conference on Atomic Layer Deposition (ALD 2021) , Abstracts. Add to list Journal Article A1 Atomic layer deposition of localized boron- and hydrogen-doped aluminum oxide using trimethyl borate as a dopant precursor Felix Mattelaer (UGent) , Michiel Van Daele, Matthias Minjauw (UGent) , Mikko Nisula (UGent) , Simon D. Elliott, Timo Sajavaara, Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2020) CHEMISTRY OF MATERIALS. 32(10). p.4152-4165