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Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering
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- Conference Paper
- C3
- open access
In situ characterization of atomic layer deposition in mesoporous thin films by grazing incidence small angle x-ray scattering
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In situ study of ALD processes using synchrotron-based X-ray fluorescence and scattering techniques
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- Conference Paper
- C3
- open access
In situ characterization of ALD in mesoporous thin films by grazing incidence small angle X-ray scattering