Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 801001185275 cql: author exact 002000392806 Add to list Journal Article A1 Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gates C TORREGIANI, Charlotte Van Bockstael, Christophe Detavernier (UGent) , C LAVOIE, A LAUWERS, K MAEX and JA KITTL (2007) MICROELECTRONIC ENGINEERING. 84(11). p.2533-2536 ← Previous 1 2