Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 801000794851 cql: author exact 801001140011 Add to list Conference Paper C1 Arc Discharges in the Reactive Sputtering of Electrical Insulating Compounds. Anneke Segers, Diederik Depla (UGent) , Karin Eufinger (UGent) , Johan Haemers (UGent) and Roger De Gryse (UGent) (2002) 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Albuquerque (NM-USA) 2002.. p.30-35 Add to list Journal Article A1 Target voltage behaviour during DC sputtering of silicon in an argon/nitrogen mixture. Diederik Depla (UGent) , A COLPAERT, Karin Eufinger (UGent) , Anneke Segers, Johan Haemers (UGent) and Roger De Gryse (UGent) (2002) VACUUM. 66(1). p.9-17