Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 2B6BA60A-F0EE-11E1-A9DE-61C894A0A6B4 cql: author exact 85E5B59E-35F8-11E8-A1F6-1F7112A95AF2 Add to list Journal Article A1 Atomic layer deposition of localized boron- and hydrogen-doped aluminum oxide using trimethyl borate as a dopant precursor Felix Mattelaer (UGent) , Michiel Van Daele, Matthias Minjauw (UGent) , Mikko Nisula (UGent) , Simon D. Elliott, Timo Sajavaara, Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2020) CHEMISTRY OF MATERIALS. 32(10). p.4152-4165