Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 29F43974-D259-11E8-A822-98505707D3EF or (type any "bookEditor issueEditor" and edito... cql: keyword exact "oxygen" Add to list Conference Paper C3 open access Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification Juan Santo-Domingo Peñaranda (UGent) , Mikko Nisula (UGent) , Sofie Vandenbroucke (UGent) , Matthias Minjauw (UGent) , Jin Li (UGent) , Andreas Werbrouck (UGent) , Jonas Keukelier (UGent) , Andrea Itziar Pitillas Martinez, Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2021) AVS 21st International Conference on Atomic Layer Deposition (ALD 2021) , Abstracts.