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- Conference Paper
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Characterization of the Electron Movement in Varying Magnetic Fields and the Resulting Anomalous Erosion
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Simplified model for the DC planar magnetron discharge
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Calculation of the effective gas interaction probabilities of the secondary electrons in a dc magnetron discharge
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- Conference Paper
- C1
- open access
Dissection of the Planar Magnetron Discharge
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Recapture of secondary electrons by the target in a DC planar magnetron discharge
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Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge
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Influence of recapture of secondary electrons on the magnetron sputtering deposition process.
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Low pressure Behaviour of the sputter magnetron discharge
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Importance of recapture of secondary electrons in cylindrical and planar magnetron discharges.