Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 176155E2-F0EE-11E1-A9DE-61C894A0A6B4 or (type any "bookEditor journalEditor issueEdi... cql: keyword exact "atomic layer deposition" Add to list Journal Article A1 open access Modification of ultra low-k dielectric films by O₂ and CO₂ plasmas Teju Tunde Olawumi, Elisabeth Levrau, Mikhail Krishtab, Christophe Detavernier (UGent) , Johann W Bartha, Kaidong Xu, Frederic Lazzarino and Mikhail R Baklanov (2015) ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 4(1). p.N3048-N3057 Add to list Journal Article A1 In situ IR spectroscopic investigation of alumina ALD on porous silica films: thermal versus plasma-enhanced ALD Elisabeth Levrau, Kevin Van de Kerckhove, Kilian Devloo-Casier (UGent) , Sreeprasanth Pulinthanathu Sree, Johan A Martens, Christophe Detavernier (UGent) and Jolien Dendooven (UGent) (2014) JOURNAL OF PHYSICAL CHEMISTRY C. 118(51). p.29854-29859 Add to list Journal Article A1 Sealed ultra low-k organosilica films with improved electrical, mechanical and chemical properties Frederik Goethals (UGent) , Elisabeth Levrau, Glenn Pollefeyt (UGent) , Mikhail R Baklanov, Ivan Ciofi, Kris Vanstreels, Christophe Detavernier (UGent) , Isabel Van Driessche (UGent) and Pascal Van Der Voort (UGent) (2013) JOURNAL OF MATERIALS CHEMISTRY C. 1(25). p.3961-3966 Add to list Journal Article A1 open access Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator Nebiyu Adello Yebo (UGent) , Sreeprasanth Pulinthanathu Sree, Elisabeth Levrau, Christophe Detavernier (UGent) , Zeger Hens (UGent) , Johan A Martens and Roel Baets (UGent) (2012) OPTICS EXPRESS. 20(11). p.11855-11862