Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 176155E2-F0EE-11E1-A9DE-61C894A0A6B4 or (type any "bookEditor journalEditor issueEdi... cql: keyword exact "alkylamide precursor" Add to list Journal Article A1 Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy Sofie Vandenbroucke (UGent) , Elisabeth Levrau, Matthias Minjauw (UGent) , Michiel Van Daele, Eduardo Solano Minuesa (UGent) , Rita Vos, Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2020) PHYSICAL CHEMISTRY CHEMICAL PHYSICS. 22(17). p.9262-9271