Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 0805DDE8-F0EE-11E1-A9DE-61C894A0A6B4 or (type any "bookEditor journalEditor issueEdi... cql: keyword exact "ald" Add to list Journal Article A1 open access Plasma-enhanced atomic layer deposition : correlating O2 plasma parameters and species to blister formation and conformal film growth Andreas Werbrouck (UGent) , Kevin Van de Kerckhove, Diederik Depla (UGent) , Dirk Poelman (UGent) , Philippe Smet (UGent) , Jolien Dendooven (UGent) and Christophe Detavernier (UGent) (2021) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. 39(6).