Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 031738A4-1727-11E7-99B1-0A37AE28A064 or (type any "bookEditor issueEditor" and edito... cql: keyword exact "dc" Add to list Journal Article A1 open access Modeling reactive magnetron sputtering : opportunities and challenges Diederik Depla (UGent) , Koen Strijckmans (UGent) , Dulmaa Altangerel (UGent) , Florian Cougnon, Robin Dedoncker, Roeland Schelfhout (UGent) , Isabella Schramm (UGent) , Filip Moens and Roger De Gryse (UGent) (2019) THIN SOLID FILMS. 688.