Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 002002064034 cql: author exact 802000618412 Add to list Conference Paper C3 open access Semiconductor-metal transition in thin VO2 films deposited by ozone based atomic layer deposition Geert Rampelberg (UGent) , Marc Schaekers, Koen Martens, Qi Xie (UGent) , Davy Deduytsche (UGent) , Bob De Schutter (UGent) , Nicolas Blasco, Jorge Kittl and Christophe Detavernier (UGent) (2012) Materials for Advanced Metallization, Abstracts. Add to list Conference Paper C3 open access Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition Geert Rampelberg (UGent) , Marc Schaekers, Koen Martens, Qi Xie (UGent) , Davy Deduytsche (UGent) , Bob De Schutter (UGent) , Nicolas Blasco, Jorge Kittl and Christophe Detavernier (UGent) (2011) Atomic Layer Deposition, 11th International conference, Abstracts. Add to list Journal Article A1 Semiconductor-metal transition in thin VO2 films grown by ozone based atomic layer deposition Geert Rampelberg (UGent) , Marc Schaekers, Koen Martens, Qi Xie (UGent) , Davy Deduytsche (UGent) , Bob De Schutter (UGent) , Nicolas Blasco, Jorge Kittl and Christophe Detavernier (UGent) (2011) APPLIED PHYSICS LETTERS. 98(16).