Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 002002038065 or (type any "bookEditor issueEditor" and editor exact 002002038065) cql: keyword exact "thin-films" Add to list Journal Article A1 TaCN growth with PDMAT and H-2/Ar plasma by plasma enhanced atomic layer deposition Qi Xie (UGent) , Davy Deduytsche (UGent) , Jan Musschoot, Roland Vanmeirhaeghe (UGent) , Christophe Detavernier (UGent) , Shao-Feng Ding and Xin-Ping Qu (2011) MICROELECTRONIC ENGINEERING. 88(5). p.646-650 Add to list Journal Article A1 Conformality of Al2O3 and AlN deposited by plasma-enhanced atomic layer deposition Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Jan Musschoot, Roland Vanmeirhaeghe (UGent) and Christophe Detavernier (UGent) (2010) JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 157(4). p.G111-G116 Add to list Journal Article A1 Modeling the conformality of atomic layer deposition: the effect of sticking probability Jolien Dendooven (UGent) , Davy Deduytsche (UGent) , Jan Musschoot, Roland Vanmeirhaeghe (UGent) and Christophe Detavernier (UGent) (2009) JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 156(4). p.P63-P67 Add to list Conference Paper P1 Thermal versus plasma-enhanced ALD : growth kinetics and conformality Christophe Detavernier (UGent) , Jolien Dendooven (UGent) , Davy Deduytsche (UGent) and Jan Musschoot (2008) ECS Transactions. In ECS Transactions 16(4). p.239-246