Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 002002038065 cql: author exact 001997337407 Add to list Conference Paper P1 Thermal versus plasma-enhanced ALD : growth kinetics and conformality Christophe Detavernier (UGent) , Jolien Dendooven (UGent) , Davy Deduytsche (UGent) and Jan Musschoot (2008) ECS Transactions. In ECS Transactions 16(4). p.239-246 Add to list Journal Article A1 Diffusion barrier properties of TaNx films prepared by plasma enhanced atomic layer deposition from PDMAT with N-2 or NH3 plasma Qi Xie, Jan Musschoot, Christophe Detavernier (UGent) , Davy Deduytsche (UGent) , Roland Van Meirhaeghe, Sven Van den Berghe, Yu-Long Jiang, Guo-Ping Ru, Bing-Zong Li and Xin-Ping Qu (2008) MICROELECTRONIC ENGINEERING. 85(10). p.2059-2063 Add to list Conference Paper C3 open access Conformality of thermal and plasma enhanced ALD Jolien Dendooven (UGent) , Jan Musschoot, Davy Deduytsche (UGent) , Roland Vanmeirhaeghe (UGent) and Christophe Detavernier (UGent) (2008) Atomic Layer Deposition, 8th International conference, Abstracts. Add to list Journal Article A1 Growth kinetics and crystallization behavior of TiO2 films prepared by plasma enhanced atomic layer deposition Q XIE, Jan Musschoot, Davy Deduytsche (UGent) , Roland Vanmeirhaeghe (UGent) , Christophe Detavernier (UGent) , S VAN DEN BERGHE, YL JIANG, GP RU, BZ LI and XP QU (2008) JOURNAL OF THE ELECTROCHEMICAL SOCIETY. 155(9). ← Previous 1 2