Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author exact 000070395425 cql: author exact 002005400228 Add to list Conference Paper C3 Surface reactions during thermal and plasma-enhanced atomic layer deposition of titanium dioxide films using tetrakis(dimethylamino)titanium Sofie Vandenbroucke (UGent) , Elisabeth Levrau, Matthias Minjauw (UGent) , Kevin Van de Kerckhove, Kilian Devloo-Casier (UGent) , Sreeprasanth Pulinthanathu Sree, Johan A Martens, Rita Vos, Karolien Jans, Jolien Dendooven (UGent) , et al. (2019) EuroCVD 22 - Baltic ALD 16, Conference abstracts. Add to list Journal Article A1 In situ IR spectroscopic investigation of alumina ALD on porous silica films: thermal versus plasma-enhanced ALD Elisabeth Levrau, Kevin Van de Kerckhove, Kilian Devloo-Casier (UGent) , Sreeprasanth Pulinthanathu Sree, Johan A Martens, Christophe Detavernier (UGent) and Jolien Dendooven (UGent) (2014) JOURNAL OF PHYSICAL CHEMISTRY C. 118(51). p.29854-29859