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Surface reactions between LiHMDS, TMA and TMP leading to deposition of amorphous lithium phosphate
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- Journal Article
- A1
- open access
A secondary reaction pathway for the alumina atomic layer deposition process with trimethylaluminum and water, revealed by full-range, time-resolved in situ mass spectrometry
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- Journal Article
- A1
- open access
Reaction pathways for atomic layer deposition with lithium hexamethyl disilazide, trimethyl phosphate, and oxygen plasma
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- Conference Paper
- C3
- open access
Design of Li-containing layers with LiHMDS
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- Conference Paper
- C3
- open access
Time-resolved in-situ mass spectrometry for monitoring and identifying reaction products in ALD processes
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Fingerprinting of ALD reaction products with time-resolved in situ mass spectrometry
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Atomic layer deposition of ZnO-SnO2 composite thin film : the influence of structure, composition and crystallinity on lithium-ion battery performance
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PE-ALD of lithium aluminum silicon oxide solid electrolyte layers using LiHMDS