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Inline X-ray metrology for complementary field-effect transistors (CFET)
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- Journal Article
- A1
- open access
Future Circular Collider Feasibility Study Report : Volume 1 Physics, Experiments, Detectors
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- Journal Article
- A1
- open access
Future Circular Collider Feasibility Study Report : Volume 3 Civil Engineering, Implementation and Sustainability
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- Journal Article
- A1
- open access
Future Circular Collider Feasibility Study Report : Volume 2 Accelerators, Technical Infrastructure and Safety
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- Miscellaneous
- open access
Future Circular Collider Feasibility Study Report : Volume 3 Civil Engineering, Implementation and Sustainability (vol 234, pg 5113, 2025)
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- Conference Paper
- C3
- open access
Complementary Field-Effect Transistors (CFET) : metrology challenges and solutions
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- Journal Article
- A2
- open access
SMBOs : buying time or improving performance?