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Defect engineering for shallow n-type junctions in germanium : facts and fiction
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Low-frequency noise spectroscopy of bulk and border traps in nanoscale devices
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Distinction between silicon and oxide traps using single-trap spectroscopy
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Towards single-trap spectroscopy: generation-recombination noise in UTBOX SOI nMOSFETs
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Integration of 50nm half pitch single damascene copper trenches in Black Diamond (R) II by means of double patterning 193nm immersion lithography on metal hardmask