Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Yang, Peilin" or (type any "bookEditor issueEditor" and editor="Yang, Peilin") Add to list Journal Article A1 open access Understanding residual stress in thin films : analyzing wafer curvature measurements for Ag, Cu, Ni, Fe, Ti, and Cr with a kinetic model Zhaoxia Rao, Sarah Berman, Peilin Yang, Diederik Depla (UGent) and Eric Chason (2021) JOURNAL OF APPLIED PHYSICS. 130(13).