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The kinetics of the low-pressure chemical vapor deposition of polycrystalline silicon from silane
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Low-pressure chemical vapour deposition of polycristalline silicon: analysis of nonuniform growth in an industrial-scale reactor
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A laboratory reactor for kinetic studies of gas-solid reactions at low pressures: design and modelling in the presence of irreducible transport phenomena
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Low pressure chemical vapour deposition of polycrystalline silicon: validation and assessment of reactor models
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The adsorption of silane, disilane and trisilane on polycrystalline silicon: a transient kinetic study