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- Journal Article
- A1
- open access
Silicon photonic microelectromechanical phase shifters for scalable programmable photonics
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- Conference Paper
- P1
- open access
Thermo-mechanical noise measurement of sealed nanobeams on a silicon photonics-MEMS platform
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- Journal Article
- A1
- open access
Efficient resonance management in ultrahigh-Q 1D photonic crystal nanocavities fabricated on 300 mm SOI CMOS platform
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- Conference Paper
- P1
- open access
Low-voltage silicon photonic MEMS switch with vertical actuation
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- Conference Paper
- P1
- open access
Wafer-level vacuum sealing for packaging of silicon photonic MEMS
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- Journal Article
- A1
- open access
Broadband compact single-pole double-throw silicon photonic MEMS switch
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- Conference Paper
- P1
- open access
Scalable nano-opto-electromechanical systems in silicon photonics
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- Conference Paper
- P1
- open access
Silicon photonic MEMS add-drop filter
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- Conference Paper
- P1
- open access
Low-power electro-optic actuators for large-scale programmable photonic circuits
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- Conference Paper
- P1
- open access
Silicon photonic MEMS phase shifter with μs time constant built on a foundry platform