Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Vanhaelemeersch, Serge" or (type exact bookEditor and editor="Vanhaelemeersch, Serge") Add to list Conference Paper P1 A novel plasma-assisted shrink process to enlarge process windows of narrow trenches and contacts for 45nm node applications and beyond - art. no. 65190U Maaike Op de Beeck (UGent) , Janko Versluijs, Zsolt Tokei, Steven Demuynck, J-F De Marneffe, Werner Boullart, Serge Vanhaelemeersch, Helen Zhu, Peter Cirigliano, Elizabeth Pavel, et al. (2007) Advances in Resist Materials and Processing Technology XXIV. In ARRAY(0x91903d8) 6519. p.U5190-U5190