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Tuning size and coverage of Pd nanoparticles using atomic layer deposition
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Atomic layer deposition of platinum and gold
(2020) -
- Journal Article
- A1
- open access
Reaction mechanism of the Me3AuPMe3-H-2 plasma-enhanced ALD process
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Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
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The co-reactant role during plasma enhanced atomic layer deposition of palladium
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Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy
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Atomic layer deposition of localized boron- and hydrogen-doped aluminum oxide using trimethyl borate as a dopant precursor
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- Journal Article
- A1
- open access
Waveguide-based surface-enhanced Raman spectroscopy detection of protease activity using non-natural aromatic amino acids
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Waveguide-based detection of protease activity using surface-enhanced Raman spectroscopy
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Surface mobility and impact of precursor dosing during atomic layer deposition of platinum : in situ monitoring of nucleation and island growth