Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Van Caekenberghe, T." or (type any "bookEditor issueEditor" and editor="Van Caekenberghe,... Add to list Miscellaneous Radio frequency single electron transmission spectroscopy of a semiconductor Si/SiGe quantum dot I. Fattal, J. Van Damme, B. Raes, C. Godfrin, G. Jaliel, K. Chen, T. Van Caekenberghe, A. Loenders, S. Kubicek, S. Massar, et al. (2025) Add to list Conference Paper P1 open access 300mm fabrication of silicon quantum dot spin qubits using 0.33NA EUV lithography S. Beyne, S. Kubicek, C. Godfrin, B. Raes, T. Van Caekenberghe, J. De Backer, Y. Hermans, F. Treska, S. Kaushik, Y. Jiang, et al. (2025) 2025 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, IEDM. In IEEE International Electron Devices Meeting