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- Conference Paper
- C1
- open access
An integrated platform for cavity optomechanics with vacuum-sealed silicon photonic MEMS
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- Conference Paper
- C1
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Low-power actuators for programmable photonic processors
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- Conference Paper
- P1
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Compact integrated silicon photonic mems power coupler for programmable photonics
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- Conference Paper
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Continuously tunable silicon photonic MEMS 2 x 2 power coupler
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- Conference Paper
- P1
- open access
Low-voltage silicon photonic MEMS switch with vertical actuation
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- Conference Paper
- P1
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Wafer-level vacuum sealing for packaging of silicon photonic MEMS
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- Conference Paper
- C1
- open access
Programmable photonic circuits using silicon photonics MEMS
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- P1
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MORPHIC : programmable photonic circuits enabled by silicon photonic MEMS
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- Conference Paper
- P1
- open access
Silicon photonic MEMS : exploiting mechanics at the nanoscale to enhance photonic integrated circuits