Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Steenbergen, J" or (type exact bookEditor and editor="Steenbergen, J") Add to list Conference Paper P1 Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing K Tomida, M Popovici, Karl Opsomer (UGent) , N Menou, WC Wang, A Delabie, J Swerts, J Steenbergen, B Kaczer, SV Elshocht, et al. (2010) IOP CONFERENCE SERIES. MATERIALS SCIENCE AND ENGINEERING. In IOP Conference Series-Materials Science and Engineering 8.