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Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuits
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- Conference Paper
- P1
- open access
CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing
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Development of a CMOS compatible biophotonics platform based on SiN nanophotonic waveguides
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Novel analog pulse-width-modulated 15-μm SiGe micromirrors
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SiGe MEMS technology: a platform technology enabling different demonstrators
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SiGe micromirrors for optical applications