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- Journal Article
- A1
- open access
Integrated silicon photonic MEMS
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- Journal Article
- A2
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Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process
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- Conference Paper
- P1
- open access
Compact integrated silicon photonic mems power coupler for programmable photonics
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- Journal Article
- A1
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Wafer-level hermetically sealed silicon photonic MEMS
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- Conference Paper
- C3
- open access
Silicon photonic MEMS for efficient scaling of programmable integrated optics
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Programmable photonic circuits powered by silicon photonic MEMS technology
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- Conference Paper
- P1
- open access
Programmable silicon photonic circuits powered by MEMS
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- Conference Paper
- P1
- open access
MORPHIC : MEMS enhanced silicon photonics for programmable photonics
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- Conference Paper
- P1
- open access
Silicon photonic MEMS add-drop filter
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- Conference Paper
- P1
- open access
Low-voltage silicon photonic MEMS switch with vertical actuation