Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Richard, O." or (type exact bookEditor and editor="Richard, O.") Add to list Conference Paper C1 Physical characterisation of high-k gate stacks deposited on HF-last surfaces H. BENDER, T. CONARD, H. NOHIRA, J. PETRY, O. RICHARD, C. ZHAO, B. BRIJS, W. BESLING, Christophe Detavernier (UGent) , W. VANDERVORST, et al. (2001) Extended Abstracts of International Workshop on Gate Insulator. IWGI 2001 (IEEE Cat. No.01EX537). p.86-92