Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Puurunen, Riikka L" or (type any "bookEditor issueEditor" and editor="Puurunen, Riikka L") Add to list Journal Article A1 open access Conformality in atomic layer deposition : current status overview of analysis and modelling Véronique Cremers (UGent) , Riikka L Puurunen and Jolien Dendooven (UGent) (2019) APPLIED PHYSICS REVIEWS. 6(2).