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- Journal Article
- A1
- open access
Anisotropic crystallization of orthorhombic ScSi on Si(001) substrates
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- Conference Paper
- C3
- open access
Source/drain and silicides for nanosheet device applications
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Epitaxial growth of strain relaxed SiGe layers with GeCl4
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- Conference Paper
- C3
- open access
Crystallographic defects in orthorhombic ScSi / Si(001) contacts
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Low temperature SiGe:B source/drain epitaxy for CFET applications
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- Conference Paper
- C3
- open access
Analysis of the Sc silicide formation mechanisms by medium-energy ion scattering
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Ge epitaxy on Si (001) using halide-based chemical vapor deposition
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- Conference Paper
- C1
- open access
Source/drain epitaxy and contacts for CFET applications
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- Conference Paper
- C3
- open access
Source/drain epitaxy and contact silicides for CFET applications
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- Journal Article
- A1
- open access
64 Gb/s O-band GeSi quantum-confined stark effect electro-absorption modulators integrated in a 300mm silicon photonics platform