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Low temperature SiGe:B source/drain epitaxy for CFET applications
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SiGe:B Source/Drain epitaxy for advanced device applications
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JST / ASPIRE project versatile quantum engineering of group-IV alloy materials for semiconductor heterogeneous integrated devices : Imec’s involvement
(2025) p.1-2 -
- Journal Article
- A1
- open access
Epitaxial Si/SiGe multi-stacks : from stacked nano-sheet to fork-sheet and CFET devices
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Carrier scattering induced linewidth broadening in in situ P-doped Ge layers on Si
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- Conference Paper
- P1
- open access
Reduction of optical bleaching in phosphorus doped ge layer on si
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- Conference Paper
- P1
- open access
Analysis of homogeneous broadening in n-type doped Ge layers on Si for laser application