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The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering
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Systematic processing of beta-tricalcium phosphate for efficient protein loading and in vitro analysis of antigen uptake
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Deposition of thin films by sputtering cold isostatically pressed powder targets: a case study
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Fundamental aspects of home made targets for magnetron sputtering
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Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides
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Quantification of the incorporation coefficient of a reactive gas on a metallic film during magnetron sputtering : the method and results
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Using Mass Spectrometry to gather some insights in the fundamentals if the reactive magnetron sputtering process of Al with O2
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Quantification of the incorporation coefficient of a reactive gas on a metallic film during magnetron sputtering: the method and results
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Method to determine the sticking coefficient of O₂ on deposited Al during reactive magnetron sputtering, using mass spectrometry
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Linking reactive sputtering models to experimental reality by determining the real-time parameters