Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Ong, Patrick*" or (type exact bookEditor and editor="Ong, Patrick*") Add to list Conference Paper P1 193nm immersion lithography for high performance silicon photonic circuits shankar kumar Selvaraja (UGent) , Gustaf Winroth, Sabrina Locorotondo, Gayle Murdoch, Alexey Milenin, Christie Delvaux, Patrick Ong, Shibnath Pathak (UGent) , Weiqiang Xie (UGent) , Gunther Sterckx, et al. (2014) PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE). In Proceedings of SPIE 9052. Add to list Conference Paper C3 open access Advanced 300-mm waferscale patterning for silicon photonics devices with record low loss and phase errors shankar kumar Selvaraja (UGent) , Gayle Murdoch, Alexey Milenin, Christie Delvaux, Patrick Ong, Shibnath Pathak (UGent) , Diedrik Vermeulen (UGent) , Gunther Sterckx, Gustaf Winroth, Peter Verheyen, et al. (2012) 17th Opto-Electronics and Communications Conference, Abstracts. p.15-16