Ghent University Academic Bibliography

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Surface reactions between LiHMDS, TMA and TMP leading to deposition of amorphous lithium phosphate

Andreas Werbrouck (UGent) , Felix Mattelaer (UGent) , Arpan Dhara (UGent) , Mikko Nisula (UGent) , Matthias Minjauw (UGent) , Frans Munnik, Jolien Dendooven (UGent) and Christophe Detavernier (UGent)

(2022) JOURNAL OF MATERIALS CHEMISTRY A. 10(7). p.3543-3551
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- Conference Paper
- C3
- open access
Design of Li-containing layers with LiHMDS

Andreas Werbrouck (UGent) , Felix Mattelaer (UGent) , Matthias Minjauw (UGent) , Frans Munnik, Jaakko Julin, Jolien Dendooven (UGent) and Christophe Detavernier (UGent)

(2020) AVS 20th International Conference on Atomic Layer Deposition (ALD 2020), Abstracts.
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- Journal Article
- A1
- open access
Reaction pathways for atomic layer deposition with lithium hexamethyl disilazide, trimethyl phosphate, and oxygen plasma

Andreas Werbrouck (UGent) , Felix Mattelaer (UGent) , Matthias Minjauw (UGent) , Mikko Nisula (UGent) , Jaakko Julin, Frans Munnik, Jolien Dendooven (UGent) and Christophe Detavernier (UGent)

(2020) JOURNAL OF PHYSICAL CHEMISTRY C. 124(50). p.27829-27839
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Magnetic characterization and electrical field-induced switching of magnetite thin films synthesized by atomic layer deposition and subsequent thermal reduction

Robert Zierold, Charlie Le Lam, Jolien Dendooven (UGent) , Johannes Gooth, Tim Böhnert, Philip Sergelius, Frans Munnik, Josep M Montero Moreno, Detlef Görlitz, Christophe Detavernier (UGent) , et al.

(2014) JOURNAL OF PHYSICS D-APPLIED PHYSICS. 47(48).

Academic Bibliography

Surface reactions between LiHMDS, TMA and TMP leading to deposition of amorphous lithium phosphate

Design of Li-containing layers with LiHMDS

Reaction pathways for atomic layer deposition with lithium hexamethyl disilazide, trimethyl phosphate, and oxygen plasma

Magnetic characterization and electrical field-induced switching of magnetite thin films synthesized by atomic layer deposition and subsequent thermal reduction

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