Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Mingardi, Andrea" or (type any "bookEditor issueEditor" and editor="Mingardi, Andrea") Add to list Conference Paper P1 Inline X-ray metrology for Complementary Field-Effect Transistors (CFET) Janusz Bogdanowicz, Andrea Mingardi, Vincent Brissonneau, Roger Loo (UGent) , Yosuke Shimura, Anjani Akula, Pallavi P. Gowda, Daisy Zhou, Naoto Horiguchi, Serge Biesemans, et al. (2025) METROLOGY, INSPECTION, AND PROCESS CONTROL XXXIX. In Proceedings of SPIE 13426.