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- Journal Article
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- open access
Atomic layer deposition of lithium borate and lithium borophosphate for lithium-ion batteries
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- Journal Article
- A1
- open access
Atomic layer deposition of aluminum phosphate layers using tris(dimethylamino)phosphine as P-precursor
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- Journal Article
- A1
- open access
Atomic layer deposition of boron-containing layers using a combined trimethylborate- and water-based plasma
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- Conference Paper
- P1
- open access
3D-DRAM Si/SiGe superlattices : inspection strategies and evaluation
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- Conference Paper
- C3
- open access
Atomic layer deposition of lithium borate and borophosphate thin films for lithium-ion battery applications
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- Journal Article
- A1
- open access
Study of SiGeAsTe and SiGeAsSe chalcogenide thin films by Raman spectroscopy and understanding of their OTS properties
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- Journal Article
- A1
- open access
Plasma-enhanced atomic layer deposition of nickel and cobalt phosphate for lithium ion batteries
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- Journal Article
- A1
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Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
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- Journal Article
- A1
- open access
Atomic layer deposition of nitrogen-doped Al phosphate coatings for Li-ion battery applications
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Controlled orientation of molecular-beam-epitaxial BaTiO3 on Si(001) using thickness engineering of BaTiO3 and SrTiO3 buffer layers