Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Litovchenko, V*" or (type exact bookEditor and editor="Litovchenko, V*") Add to list Journal Article A1 Stimulated oxygen impurity gettering under ultra-shallow junction formation in silicon O Oberemok, V Kladko, V Litovchenko, B Romanyuk, V Popov, V Melnik, A Sarikov, O Gudymenko and Jan Vanhellemont (UGent) (2014) SEMICONDUCTOR SCIENCE AND TECHNOLOGY. 29(5). Add to list Conference Paper C3 open access Oxygen gettering in low-energy arsenic ion implanted Cz-silicon O Oberemok, V Kladko, V Litovchenko, B Romanyuk, V Popov, V Melnik and Jan Vanhellemont (UGent) (2014) E-MRS spring meeting, Abstracts. Add to list Conference Paper C1 Formation of shallow n-p junctions in Cz-Si by low-energy implantation of carbon ions B Romanyuk, V Melnik, V Popov, V Litovchenko, V Babich, V Ilchenko, V Kladko and Jan Vanhellemont (UGent) (2014) ECS Transactions. 64(11). p.187-198 Add to list Conference Paper P1 Oxygen gettering in low-energy arsenic or antimony ion implanted Cz-silicon O Oberemok, V Kladko, V Litovchenko, B Romanyuk, V Popov, V Melnik and Jan Vanhellemont (UGent) (2014) Physica Status Solidi C-Current Topics in Solid State Physics. 11(11-12). p.1634-1639