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Kinetics of agglomeration of NiSi and NiSi2 phase formation
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In-situ monitoring of thin film reactions during rapid thermal annealing: nickel silicide formation
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- Journal Article
- A1
- open access
An off-normal fibre-like texture in thin films on single-crystal substrates
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In situ monitoring of thin film reactions during rapid thermal annealing: Nickel silicide formation
(2002) RAPID THERMAL AND OTHER SHORT-TIME PROCESSING TECHNOLOGIES III, PROCEEDINGS. 2002(11). p.455-467