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- Journal Article
- A1
- open access
Integrated silicon photonic MEMS
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- Conference Paper
- C1
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Scaling programmable silicon photonics circuits
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- Conference Paper
- C1
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Low-power actuators for programmable photonic processors
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- Journal Article
- A1
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Wafer-level hermetically sealed silicon photonic MEMS
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- Conference Paper
- C3
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Silicon photonic MEMS for efficient scaling of programmable integrated optics
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- Conference Paper
- P1
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Programmable silicon photonic circuits powered by MEMS
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- Conference Paper
- P1
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MORPHIC : MEMS enhanced silicon photonics for programmable photonics
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- Conference Paper
- P1
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Scalable nano-opto-electromechanical systems in silicon photonics