Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Horiguchi, N." or (type any "bookEditor issueEditor" and editor="Horiguchi, N.") Add to list Conference Paper C3 SiGe:B Source/Drain epitaxy for advanced device applications T. Dursap, C. Porret, E. Rosseel, A. Akula, A. Pondini, H. Mertens, J. Ganguly, R. Sarkar, N. Horiguchi, R. Langer, et al. (2025) European Conference on Innovative and Advanced Epitaxy, Abstracts. p.43-43 Add to list Conference Paper C3 Inline X-ray metrology for complementary field-effect transistors (CFET) J. Bogdanowicz, A. Mingardi, V. Brissonneau, Roger Loo (UGent) , Y. Shimura, A. Akula, P. P. Gowda, D. Zhou, N. Horiguchi, S. Biesemans, et al. (2025) SPIE Advanced Lithography and Patterning Conference : Metrology, Inspection, and Process Control XXXIX, Abstracts. Add to list Journal Article A1 open access Epitaxial Si/SiGe multi-stacks : from stacked nano-sheet to fork-sheet and CFET devices Roger Loo (UGent) , A. Akula, Y. Shimura, C. Porret, E. Rosseel, T. Dursap, A. Y. Hikavyy, M. Beggiato, J. Bogdanowicz, A. Merkulov, et al. (2025) ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 14(1). Add to list Conference Paper C3 open access Complementary Field-Effect Transistors (CFET) : metrology challenges and solutions J. Bogdanowicz, A.-L. Charley, M. Saib, M. Beggiato, G. Lorusso, V. Brissonneau, E. Dupuy, Roger Loo (UGent) , Y. Shimura, A. Akula, et al. (2024) International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN 2024), Abstracts.