Show 10 5 10 15 20 50 100 250 Sort by year (new to old) Actions Download search results Subscribe to news feed Your filters: cql: author="Heylen, N." or (type any "bookEditor issueEditor" and editor="Heylen, N.") Add to list Conference Paper P1 Integration of 50nm half pitch single damascene copper trenches in Black Diamond (R) II by means of double patterning 193nm immersion lithography on metal hardmask J. Van Olmen, A. Al-Bayati, G. Beyer, P. Boelen, L. Carbonell, Kelvin Chan, I. Ciofi, M. Claes, A. Cockburn, G. Druais, et al. (2008) ADVANCED METALLIZATION CONFERENCE 2007 (AMC 2007). In MATERIALS RESEARCH SOCIETY CONFERENCE PROCEEDINGS 23. p.355-361 Add to list Conference Paper P1 Novel patterning shrink technique enabling sub-50nm trench and contact integration S. Demuynck, Zs. Tokei, C. Zhao, J. F. de Marneffe, H. Struyf, W. Boullart, Maaike Op de Beeck (UGent) , L. Carbonell, N. Heylen, J. Vaes, et al. (2007) ISSM 2007: 2007 INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, CONFERENCE PROCEEDINGS.