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What do we know about hydrogen-induced thermal donors in silicon?
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A DLTS study on plasma-hydrogenated n-type high-resistivity magnetic Cz silicon
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Hydrogen-plasma-induced thermal donors in high resistivity n-type magnetic Czochralski-grown silicon
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DLTS study on deep levels formed in plasma hydrogenated and subsequently annealed silicon
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P-N junction diodes fabricated based on donor formation in plasma hydrogenated P-type Czochralski silicon
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Impact of direct plasma hydrogenation on thermal donor formation in n-type CZ silicon