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- Conference Paper
- open access
Crystallographic defects in orthorhombic ScSi / Si(001) contacts
(2025) -
- Conference Paper
- open access
Texture of Orthorhombic ScSi in Annealed TiN / Sc / Si(:P)(001) Contact Stacks
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- Journal Article
- A1
- open access
Crystallinity and composition of Sc1-x(-y)Si x(P y) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications
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- Conference Paper
- P1
- open access
Si photonic device uniformity improvement using wafer-scale location specific processing
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Een studie van de invloed van temperatuurbehandelingen op de elektrische eigenschappen van magnetron-gesputterde kobaltsilicide-, titaansilicide- en titaannitride-schottkydiodes op GaAs
(1991)