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- Journal Article
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- open access
Anisotropic crystallization of orthorhombic ScSi on Si(001) substrates
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- Conference Paper
- C3
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Crystallographic defects in orthorhombic ScSi / Si(001) contacts
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- Conference Paper
- C1
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Source/drain epitaxy and contacts for CFET applications
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- Conference Paper
- C3
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Source/drain epitaxy and contact silicides for CFET applications
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- Conference Paper
- C3
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Texture of orthorhombic ScSi in annealed TiN / Sc / Si(:P)(001) contact stacks
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- Journal Article
- A1
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Crystallinity and composition of Sc1-x(-y)Si x(P y) silicides in annealed TiN/Sc/Si:P stacks for advanced contact applications
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- Conference Paper
- P1
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Si photonic device uniformity improvement using wafer-scale location specific processing
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Een studie van de invloed van temperatuurbehandelingen op de elektrische eigenschappen van magnetron-gesputterde kobaltsilicide-, titaansilicide- en titaannitride-schottkydiodes op GaAs
(1991)