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Opportunities for mechanically actuated photonics
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- Journal Article
- A1
- open access
Vacuum-sealed silicon photonic MEMS tunable ring resonator with an independent control over coupling and phase
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- Journal Article
- A1
- open access
Integrated silicon photonic MEMS
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- Conference Paper
- P1
- open access
A bistable silicon photonic mems phase switch for nonvolatile photonic circuits
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- Conference Paper
- C3
- open access
Silicon photonic MEMS for efficient scaling of programmable integrated optics
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- Conference Paper
- P1
- open access
Silicon photonic MEMS phase shifter with μs time constant built on a foundry platform
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- Journal Article
- A1
- open access
Silicon photonic microelectromechanical phase shifters for scalable programmable photonics
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- Journal Article
- A1
- open access
MEMS-enabled silicon photonic integrated devices and circuits
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Liquid crystal phase shifter integrated in a silicon photonics platform
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- Conference Paper
- P1
- open access
MORPHIC : programmable photonic circuits enabled by silicon photonic MEMS