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Conformal nanocoatings for surface engineering of particles by thermal and plasma-enhanced atomic layer deposition using a rotary reactor
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Thermal and plasma-enhanced atomic layer deposition of TiN using TDMAT and NH3 on particles agitated in a rotary reactor
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- Conference Paper
- C3
- open access
Thermal and plasma-enhanced ALD of TiN on powders using a rotary reactor
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- Conference Paper
- C1
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A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
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A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
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- Conference Paper
- C3
- open access
Comparison of three processes for plasma-enhanced ALD of platinum
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- Conference Paper
- C3
- open access
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
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Plasma-enhanced ALD of platinum with O₂, N₂ and NH₃ plasmas
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Visible and near-infrared emission by samarium(III)-containing ionic liquid mixtures
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Thermotropic ruthenium(II)-containing metallomesogens based on substituted 1,10-phenanthroline ligands