Show
Sort by
-
- Journal Article
- A2
- open access
Characterization of Ru4-xTax (x = 1,2,3) alloy as material candidate for EUV low-n mask
-
- Journal Article
- A2
- open access
Pulsed chemical vapor deposition of conformal GeSe for application as an OTS selector
-
Study of electron traps associated with oxygen superlattices in n‐type silicon
-
A deep-level transient spectroscopy study of p-type silicon Schottky barriers containing a Si-O superlattice
-
Quasi two-dimensional Si-O superlattices : atomically controlled growth and electrical properties
-
Germanium surface passivation and atomic layer deposition of high-k dielectrics: a tutorial review on Ge-based MOS capacitors
-
- Journal Article
- A1
- open access
Effective electrical passivation of Ge(100) for HfO2 gate dielectric layers using O-2 plasma
-
- Journal Article
- A1
- open access
TiO2/HfO2 bi-layer gate stacks grown by atomic layer deposition for germanium-based metal-oxide-semiconductor devices using GeOxNy passivation layer
-
- Journal Article
- A1
- open access
Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices
-
High-performance Ge MOS capacitors by O₂ plasma passivation and O₂ ambient annealing